Federico CapassoFederico Capasso

Harvard University, USA


Quantum Cascade Laser Renaissance
Parametric effects and ultrafast gain dynamics in QCLs lead to single mode instability, multimode
operation and to a new regime, the “harmonic” state, which are opening up new frontiers in frequency combs and RF Photonics

About the Speaker
Federico Capasso is the Robert Wallace Professor of Applied Physics at Harvard University, which he joined in 2003 after 27 years at Bell Labs where his career advanced from postdoctoral fellow to Vice President for Physical Research. He is a member of the National Academy of Sciences, the National Academy of Engineering, a fellow of the American Academy of Arts and Sciences (AAAS) and a foreign member of the Accademia dei Lincei. His awards include the IEEE Edison Medal, the American Physical Society Arthur Schawlow Prize in Laser Science, the King Faisal Prize, the SPIE Gold Medal, the AAAS Rumford Prize, the IEEE Sarnoff Award, the Materials Research Society Medal, the Franklin Institute Wetherill Medal, the European Physical Society Quantum Electronics Prize, the Rank Prize in Optoelectronics, the Optical Society Wood Prize, the Berthold Leibinger Future Prize, the Julius Springer Prize in Applied Physics, the Institute of Physics Duddell Medal, the Jan Czochralski Award for lifetime achievements in Materials Science, and the Gold Medal of the President of Italy for meritorious achievement in science. 

Britt Turkot

Intel Corp, USA

Compact Sources and Chip-Making
 In the past year, EUV LPP exposure sources have reached satisfactory power levels, achieving the long-established milestone of 250W. With EUV exposure tools, the source remains the leading cause of system down-time, including both routine scheduled maintenance as well as unplanned corrective actions. The nature of LPP source design leads to contamination, exposure dose errors, and the need for additional power to mitigate such effects. Compact sources offer possible opportunities in support of chip-making, including not only the option to replace the exposure source but also to provide sources for mask metrology (both lens and lens-less) as well as to support materials research and development.

About the Speaker

Britt joined the Photolithography department at Intel’s Portland Technology and Development organization in 1996 after completing her B.S. degree in Metallurgical Engineering and M.S. and Ph.D. degrees in Materials Science and Engineering from the University of Illinois at Urbana-Champaign. Britt has been involved in many aspects of lithography development in PTD, including her current role as program manager of Intel’s EUV lithography program along with development of scanner reticle and frame graphics as well as the integration of new lithography tool platforms into Intel factories.

Andreas Tünnermann

Fraunhofer Institute for Applied Optics and Precision Engineering, Germany

Perfomance Scaling of Ultrafast Lasers via Coherent Combination
Coherent combination of ultrashort laser pulses emitted from spatially-separated amplifiers is a promising power-scaling technique for ultrafast laser systems concerning peak power and average power. In this presentation, the status and prospects of coherently combined fiber-CPA systems will be discussed.

About the Speaker

Andreas Tünnermann is Director of the Fraunhofer Institute of Applied Optics and Precision Engineering and Chair for the Insitute of Applied Physics at Friedrich-Schiller-University Jena. His main research interests include scientific and technical aspects associated with the tailoring of light. Research topics are the design and manufacturing of novel micro- and nano-optical photonic devices using high-end microlithography and its application for generation, amplification, steering and switching of light. In particular, his work on high power diode pumped fiber and waveguide lasers is widely recognized.
He is a member of the German Physical Society, European Physical Society and acatech, as well as a fellow of OSA and SPIE. His research activities on applied quantum electronics have been awarded with the Röntgen-Award, WLT-Award, Otto-Schott-Award, Leibinger Innovation Award and the Gottfried-Wilhelm-Leibniz-Award. Most recently, he received a European Research Council (ERC) Advanced Grant.