Presiders: Alan Petersen, MKS/Spectra-Physics, USA and Johannes Trbola, Trbola Engineering, Germany
8:00-8:09 AM - Welcome and Introduction
9:04-9:49- JTu1A.2 • From µs to fs, kHz to GHz: laser micromachining in the microelectronics industry
Jan Kleinert, MKS Instruments, Inc.
Description: The ever increasing performance of everyday electronics causes a relentless drive for 'faster, better, cheaper' laser based manufacturing technologies. Understanding the underlying highly nonlinear laser material interaction dynamics is key to keeping pace.