Skip to main content

Laser Micromachining of Silicon Surface under Axial Magnetic Field: Nanosecond versus Femtosecond Pulses (JTu5A.24)

Presenter: Vitaly Gruzdev, University of New Mexico

Influence of axial magnetic field on micromachining of silicon crystals by ultraviolet nanosecond laser pulses is orders-of-magnitude stronger than by near-infrared femtosecond pulses. It suggests substantial improvement of silicon micromachining by ultraviolet nanosecond laser pulses.

Authors:Hamid Farrokhi, Nanyang Technological University / Vitaly Gruzdev, University of New Mexico / Hongyu Zheng, Shandong University of Technology / Wei Zhou, Nanyang Technological University

Poster Presentation

Authentication Required

Access to poster content is available to logged in registered attendees, please login now to participate.