Laser Micromachining of Silicon Surface under Axial Magnetic Field: Nanosecond versus Femtosecond Pulses (JTu5A.24)
Presenter: Vitaly Gruzdev, University of New Mexico
Influence of axial magnetic field on micromachining of silicon crystals by ultraviolet nanosecond laser pulses is orders-of-magnitude stronger than by near-infrared femtosecond pulses. It suggests substantial improvement of silicon micromachining by ultraviolet nanosecond laser pulses.
Authors:Hamid Farrokhi, Nanyang Technological University / Vitaly Gruzdev, University of New Mexico / Hongyu Zheng, Shandong University of Technology / Wei Zhou, Nanyang Technological University