Compact (EUV & X-ray) Light Sources

26 - 28 March 2018
Hilton Strasbourg, Strasbourg, France

Topic Categories

1. EUV through hard-x-ray sources and components
  • Compact storage ring sources
  • Compact Free-electron lasers
  • Inverse Compton scattering sources
  • Laser and discharge produced plasma sources
  • Terahertz-based sources
  • X-ray laser sources
  • High-harmonic generation sources
  • Radio frequency cavities and guns
  • Undulators and wigglers (including permanent magnet, short-period microwave and THz undulators, superconducting devices)
  • Magnets and multiband achromats
  • High power lasers
  • Vacuum chambers and components
  • Others

2. Applications
  • EUV lithography and mask inspection
  • Semiconductor wafer inspection and metrology
  • Phase contrast imaging and tomography
  • Medical and clinical imaging
  • Biological imaging
  • Macromolecular crystallography
  • Cultural heritage studies
  • Non-destructive testing
  • Ultrafast and dynamic studies
  • Wide field imaging
  • Others

3. Instrumentation, optics, detectors, data management and processing