Events
Imaging at the Nanoscale with Bright Beams of Extreme Ultraviolet Laser Light
Managed by Optica
18 October 2012
Dr Carmen Menoni from CSU will be discussing "Imaging at the nanoscale with bright beams of extreme ultraviolet laser light". Abstract: Bright beams of extreme ultraviolet (EUV) laser light with wavelengths in the range of 10-50 nm, are enabling the implementation of imaging, and patterning tools that can probe the nano-world on a table top. In this talk I will review work by our group on the demonstration of imaging systems that have reached a spatial resolution down to 38 nm and can: i) image dynamics at the nanoscale using single-shot flash illumination, and ii) image surfaces and inspect for defects in EUV Lithograph masks. I will also describe a novel mass spectrometry imaging system that exploits the interaction of extreme ultraviolet laser light and organic materials to map chemical composition in three dimensions with nanoscale resolution.
Sponsor: Rocky Mountain Section of the Optical Society of America (RMOSA)